Development of 3D Electron Beam Lithography Fabrication Simulator

Hsiu-Ming Yeh; Kuo-Shen Chen; I-Kuan Lin

doi:10.6180/jase.2007.10.2.14

Development of 3D Electron Beam Lithography Fabrication Simulator

Hsiu-Ming Yeh¹, Kuo-Shen Chen This email address is being protected from spambots. You need JavaScript enabled to view it.¹ and I-Kuan Lin¹

¹Department of Mechanical Engineering, National Cheng-Kung University, Tainan, Taiwan 701, R.O.C.

Received: March 4, 2007
Accepted: April 18, 2007
Publication Date: June 1, 2007

Download Citation: ||https://doi.org/10.6180/jase.2007.10.2.14

ABSTRACT

Although electron beam lithography has been demonstrated to have distinguished performance in creating 3D micro polymer structures, the process design for creating the desired shape still largely depends on a trials and errors basis. A cellular automata based process emulator is developed and presented under an OpenGL environment for reducing the cost and shortening the development period of the process. By using a convolution approach, this emulator converts the processing parameters into the final spatial dosage distribution and subsequently, the final geometry of structures. Examples of 3D micro structures such as micro lens are presented. By the tool, it is possible to provide guidelines for optimizing the fabrication process and reducing the cost for the related e-beam lithography based 3D fabrication.

Keywords: Electron Beam Lithography, CAD, Cellular Automata, Micro Fabrication

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