Ding-An Chiang This email address is being protected from spambots. You need JavaScript enabled to view it.1, Cheng-Tzu Wang2 , Yi-Hsin Wang3 and Chun-Chi Chen1
1Department of Computer Science and Information Engineering, Tamkang University, Tamsui, Taiwan 251, R.O.C. 2Department of Computer Science, National Taipei University of Education, Taipei, Taiwan 106, R.O.C. 3Department of Information Management, Chang Gung Institute of Technology, Taiwan, R.O.C
Received: October 31, 2008 Accepted: April 30, 2009 Publication Date: December 1, 2010
In this paper, we use decision tree to establish a yield improvement model for glass sputtering process; however, the tree may have irrelevant values problem. In other words, when the tree is represented by a set of rules, not only comprehensibility of the resultant rules will be detracted but also critical factors of the manufacturing process cannot be effectively identified. From the performance issue and practical issue, we have to remove irrelevant conditions from the rules; otherwise, a domain expert is needed to review the decision tree. In this paper, we use a very simple example to demonstrate this point of view. Moreover, to identify and remove irrelevant conditions from the rules, we also revise Chiang’s previous algorithm such that the modified algorithm can deal not only discrete data but also quantitative data.
Keywords: Data Mining, Decision Tree, The Irrelevant Values Problem, Glass Sputtering Process, Yield Analysis
REFERENCES
[1] P. Besse, C. Legall. “Application and Reliability of Change-Point Analyses for Detecting a Defective Stage in Integrated Circuit Manufacturing,” Communications in Statistics: Simulation and Computation, Vol. 35, No. 2, pp.479-496, (2006).
[2] C. F. Chien, W. C. Wang, J. C. Cheng, “Data mining for yield enhancement in semiconductor manufacturing and an empirical study, ” Expert Systems with Applications, Vol. 33, No. 1, pp.192-198(2007).
[3] M. Gardner, J. Bieker, “Data mining solves tough semiconductor manufacturing problems, ” In Proceedings. KDD-2000, ACM, New York, NY, pp.376–383, USA, (2000).
[4] B. Kundu, K. P. White Jr, C. Mastrangelo, “Defect Clustering and Classification for Semiconductor Devices, ” MWSCAS-2002, Vol.2, pp.561-564(2002).
[5] M. Last, G. Danon, S. Biderman, E. Miron, “Optimizing a batch manufacturing process through interpretable data mining models, ” Journal of Intelligent Manufacturing. (2008).
[6] C. Peng, C. Chien, “Data value development to enhance yield and maintain competitive advantage for semiconductor manufacturing, ” International Journal of Service Technology and Management, Vol. 4,No. 6 , pp.365-383(2003).
[7] D. Braha, A. Shmilovici, “Data Mining for Improving a Cleaning Process in the Semiconductor Industry, ” IEEE Transaction Semiconductor Manufacturing, Vol.15, No.1 ( 2002) .
[8] J. CHENG, U. M. Fayyad, K. B. Irani, Z. Qian, “Improved decision trees: a generalized version of ID3, ” Proc. of the Fifth Int. Conf. on Machine Learning, pp.100-108. (1988).
[9] U. M. Fayyad, K. B. Irani, “A machine learning algorithm (GID3*) for automated mated knowledge acquisition improvements and extensions, ” General Motors Reseat Report CS-634, Warren, MI: GM research labs (1991).
[10] U. M. Fayyad, “Branching on attribute values in decision tree generalization, ” Proc. Twelfth National Conference on Artificial Intelligence AAAI-94, Seattle, pp.104-110 Washington (1994).
[11] J. R. Quinlan, J.R , “C4.5: programs for Machine Learning, ” Morgan Kaufmann Publishers Inc., San Francisco, CA, USA(1993).
[12] L. Breslow, D. W. Aha, “Simplifying decision trees: a survey,” Navy Center for Applied Research in Knowledge Engineering Review Technique Report(1998).
[13] D. A. Chiang, W. Chen, Y. F. Wang, C. F. Hsu, “The irrelevant values problem in the ID3 tree, ” Computers and Artificial Intelligence, Vol. 10, pp.169-182( 2000).
[14] L. Breiman, J. H. Friedman, R. A. Olshen, and C. J. Stone, “Classification and Regression Trees,” International Thomson Publishing (1984).
[15] J. R.Quinlan, “Introduction to decision tree,” Machine Learning, Vol. 1, pp.81-106(1986).
[16] M. Kaya, R. Alhajj, “Genetic Algorithm based framework for mining fuzzy association rules,” Fuzzy set and system, Vol. 152, pp.587–601(2005).
We use cookies on this website to personalize content to improve your user experience and analyze our traffic. By using this site you agree to its use of cookies.