Hsin-Hsiung Wang1, Kuan-Chun Liu1, Kai-Chung Ko1 and Lung-Jieh Yang This email address is being protected from spambots. You need JavaScript enabled to view it.1 1Department of Mechanical and Electro-Mechanical Engineering, Tamkang University Tamsui, Taiwan 251, R.O.C.
Received:
January 10, 2005
Accepted:
May 24, 2005
Publication Date:
September 1, 2005
Download Citation:
||https://doi.org/10.6180/jase.2005.8.3.11
This paper demonstrates a newly developed parylene bowed-type valve with the same working principle of the “buckled straw”. Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing parts into the valve device. By the merit of its concise mechanism, i.e., a straight pipeline with the region for buckling, the bowed-type valve intrinsically operates with almost zero dead volume. The fabrication sequence of this new valve combines the techniques of sacrificial mould of capillary glass tubes, conformal coating of parylene and SU-8 photolithography. A valve device of 1 cm long, 0.8 cm wide is demonstrated, and the turn-on angle of this valve verified as 135º experimentally.ABSTRACT
Keywords:
Bowed-type valve, Circular microchannel, Parylene, SU-8
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