Surface Tension-Driven Microvalves with Large Rotating Stroke

Lung-Jieh  Yang; Kuan-Chun Liu

doi:10.6180/jase.2007.10.2.08

Surface Tension-Driven Microvalves with Large Rotating Stroke

Lung-Jieh Yang This email address is being protected from spambots. You need JavaScript enabled to view it.¹ and Kuan-Chun Liu¹

¹Department of Mechanical and Electro-mechanical Engineering, Tamkang University, Tamsui, Taiwan 251, R.O.C.

Received: March 14, 2007
Accepted: April 11, 2007
Publication Date: June 1, 2007

Download Citation: ||https://doi.org/10.6180/jase.2007.10.2.08

ABSTRACT

The design, the fabrication, and the testing result of a novel microvalve actuated by surface tension force were described in this work. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve in a buckling deformation way without feeding external electrical power. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204 º and 15 ° for the cases of not integrating and integrating a parylene microtube, respectively.

Keywords: Surface Tension, SU-8, Parylene, Actuator, Buckling

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